《Effect of annealing on microstructure and properties of Si3N4AlN composite ceramics》.pdfVIP
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10.1007/s11771-011-0787-2
Effectofannealingonmicrostructureandpropertiesof
Si3N4-AlNcompositeceramics
XUPeng1,2 YANGJian1 QIUTai1 CHENXing1
1.CollegeofMaterialsScienceandEngineering,NanjingUniversityofTechnology,Nanjing210009,China;
2.BeijingSinomaSyntheticCrystalsCo.Ltd.,Beijing100018,China
Abstract:Aimingatdevelopingnovelmicrowave-transparentceramicswithlowdielectricloss,highthermalconductivityandhigh
strength,Si3N4-AIN(30%,massfraction)compositeceramicswithLa2O3assinteringadditivewerepreparedbyhot-pressingat
1800℃ andsubsequentlyannealedat1450℃ and1850℃ for2hand4h,respectively.Thematerialswerecharacterízedby
XRDandSEM.Theeffectofannealingprocessonthephasecomposition,sinteringperformance,microstructure,bendingstrength,
dielectriclossandthermalconductivityofthematerialswasinvestigated.Theresultsshowedthatbothannealingat1850℃ and
1450℃ promotedthephasetransformationofα-Si3N4toβ-Si3N4.Afterannealingat1850℃,graingrowthtoacertainextent
occurredinthematerials.Especially,theelongated,β-Si3N4grainsshowedaslightincreaseindiameterfrom0.2μmto0.6μm
approximatelyandadecreaseinaspectratio.Asaresult,astheannealingtimeincreasedto4h,thebendingstrengthdeclinedfrom
456MPato390MPa,whereasthedielectriclossdecreasedto2.15×10-3andthethermalconductivityincreasedto16.3W/(m·K)
gradually.Whenannealedat1450℃,increasingtheannealingtimeto4hsignificantlypromotedthecrystallizationofglassyphase
toLa2Si6N8O3phaseinthematerials,whichledtotheincreaseinbendingstrengthto619MPaandthermalconductivityto
15.9W/(m·K),respectively,andsimultaneouslythedecreaseindielectriclossto1.53×10-3.
Si3N4-AlNcomposite;annealing;La2O3;bendingstrength;thermalconductivity;dielectricloss
ProjectsupportedbytheNationalNaturalScienceFoundationofChina;Project(2009AA05Z313)supportedbytheNational
HighTechnologyRese
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