CrCuAgCuCr新型银基复合薄膜电极的防氧化性能研究.pdf

第3l卷第4期 真空科学与技术学报 2011年7、8月 CHINESEJOURNALoFVACUUMScIENCEAND1ECHNOmGY 381 Cr／Cu／Ag／Cu／Cr、新型银基复合薄膜电极的 防氧化性能研究 翁卫祥 贾 贞 于光龙 李 昱 郭太良’ (福州大学物理与信息工程学院福州350002) OxidationResistanceofNovel Cr／Cu／Ag／Cu／Cr Ag-Based FilmElectrodes Composite Zhen，YuGuanglong，LiYu，GuoTailiang。 WengWeixiang，Jia and 350002，Ch／na) (cD％BofPhysicsInformationEngi,,咖，Fuzhouu,,i,肌ity，Fuzhou AbstractThenovel of hy哪deposited typeelectrode，fabricated诵th‰AS-basedCr／Cu／AS／Cu／Crcomposite and ofthe DC and microstructures developed．The compositelay- by magnetronsputteringbylithography，Wag properties andafter characterizedwith electron conventional e玛，before anneahng，were X—raydiffraction，scanniJlgmicroscopy，and surface ofthe conditionsonthe wereevaluated．Wefoundthat as probes．Theimpactsgrowth compositelayers while舵ting the diffusion Cu theadhesionattheinterfaceofCrand balTier，thelayer AS．Besides，lowtemperature oxygen improves affectsthe oftheelectrode b(瑚llSetheCuandCr 500E，little agai斌 annealing，say resistivity possibly layersprotectAS oxidation．Theresultsshowthatthenovel electrode诵tIlfavorable Cr／Cu／AS／Cu／Cr