《Analysis of recoil force during Nd-YAG laser ablation of silicon》.pdf

Appl. Phys. A 79, 1341–1344 (2004) Applied Physics A DOI: 10.1007/s00339-004-2767-y Materials Science Processing d.j. lee Analysis of recoil force during s.h. jeong Nd : YAG laser ablation of silicon Kwangju Institute of Science and Technology, 1 Oryong-dong, Puk-gu, Kwangju 500-712, South Korea Received: 26 September 2003/Accepted: 4 March 2004 Anisimov’s work. Semak and Matsunawa [5] have shown that Published online: 26 July 2004 • © Springer-Verlag 2004 the melt flow driven by recoil pressure is important for ac- curate modeling of keyhole formation or cutting-front propa- ABSTRACT Recoil force exerted on the substrate during gation. More recently, Chen and Wang [6] proposed a model a nanosecond laser ablation of silicon is measured. The ablation that includes the attenuation of incident laser energy within sample is placed at the end of a 400-µm-thick and 13-mm-long silicon cantilever. The vibration amplitude of the cantilever in- the laser-induced plasma plume, which was ignored in Anisi- mov’s model. duced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever Measurement of recoil momentum is mostly performed with a theoretical model, the recoil momentum is estimated. For with a pendulum. As early as in the 1960s, Gregg