- 1、本文档共11页,可阅读全部内容。
- 2、原创力文档(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
《General Theory of Transport in Silicon- Germanium Alloys》.pdf
Transpo rt in Silicon- Germanium Heterostructures Daniel Chrastina
3 General Theory of Transport in Silicon- Germanium Alloys
Ignoring doping for the moment, there are two ways in which an alloy layer
may be incorporated within a heterostructure. In a pseudomorphic structure (such as
that described in Figure 3.1) a silicon-germanium alloy is grown directly on pure
silicon. (It is normal practice not to grow the alloy directly onto the silicon substrate
but to deposit a few hundred nanometres of pure silicon first.) The alloy layer is then
generally capped by more pure silicon (there are issues regarding the oxidization of a
1
silicon-germanium alloy ). The alloy layer will match its lattice constant to that of the
pure silicon, provided it is not too thick, the germanium concentration is not too high,
or the growth temperature is not too high. For this reason, whilst pseudomorphic
structures are generally simple to grow, they are generally limited to low germanium
concentrations and thin alloy layers.
Alternatively, to allow for greater flexibility regarding thicker alloys with higher
germanium concentrations or pure silicon under tensile strain (for electron channels,
see Chapter 6) a virtual substrate may be grown. A buffer layer of alloy is grown and
allowed to relax, and then the active channels are grown on this. The germanium
concentration within the buffer may be graded to increase upwards, but is generally
constant for the few hundred nanometres below the active channel. It is important to
ensure that the buffer layer is fully relaxed (by growing it at a high enough
temperature) and that the defects are not migrating up into the active channel.2
3.1 Principle Advantages In Using A Silicon-Germanium Heterostructure
您可能关注的文档
- 《FINC6021 - (Relative Valuation (2016(BB)))》.pptx
- 《Finite extinction time for the solutions to the Ricci flow on certain three-manifolds》.pdf
- 《Firms》.pdf
- 《First Time Home Buyer 系列》.doc
- 《FlashTool使用手册USB》.pdf
- 《flojet气动隔膜泵》.doc
- 《FM 1210-Approval Standard for Swing Check Valves》.pdf
- 《FM185 二十四路远程温度数据采集模块使》.pdf
- 《FM186 24路远程大信号数据采集模块使用说》.pdf
- 《Ford_TS16949顾客特殊要求-中英》.pdf
- 网络时代大学生思想政治教育面临的机遇和应对措施.pptx
- 缩宫素联合卡前列素氨丁三醇对改善剖宫产产妇术后出血及促进子宫复旧的效果研究.pptx
- 综合护理对慢性扁桃体炎切除术后护理效果的影响.pptx
- 二零二五年度国防装备生产保密合同3篇.docx
- 二零二五年度国家科技部技术合同范本(生物制药研发合作)3篇.docx
- 二零二五年度国家科技部技术合同示范文本(新能源领域应用)3篇.docx
- 二零二五年度商业街区智能监控设备安装合同书.docx
- 二零二五年度国家科技部技术合同模板(环保技术解决方案)3篇.docx
- 二零二五年度国防工业信息安全保密协议2篇.docx
- 二零二五年度国家科技部技术合同范本(智能机器人研发)3篇.docx
最近下载
- 07米联客2020版FPGA教程(FT60X篇).pdf
- (完整)混凝土回弹强度自动计算EXCEL表.xls VIP
- 《 房地产企业税制改进政策研究》范文.docx VIP
- 房产抵押合同范本6篇 .pdf VIP
- 工业机器人系统操作员(技师)理论复习考试题库(附答案).docx
- 山东省中小学教师人工智能赋能教学教研线上研修活动单元测试答案.docx VIP
- 变电站水泥电线杆防腐加固工程施工组织设计方案(可编辑).doc VIP
- 第11课 近代职业教育的兴起和发展(教学设计)-【中职专用】《世界历史》.docx
- 关于延长中频炉炉衬寿命的探讨.pdf
- 核心素养导向下的小学科学教学改革研究教学研究课题报告.docx
文档评论(0)