MEMS integrated narrow band infrared emitter and detector for infrared gas sensor教材.pdfVIP

Home Search Collections Journals About Contact us My IOPscience MEMS integrated narrow band infrared emitter and detector for infrared gas sensor This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2011 J. Phys.: Conf. Ser. 276 012129 (/1742-6596/276/1/012129) View the table of contents for this issue, or go to the journal homepage for more Download details: IP Address: 2 The article was downloaded on 29/12/2012 at 01:04 Please note that term