Nonlinear modeling and decoupling control of XY micropositioning stage with piezoelectric actuators教材.pdfVIP

IEEE/ASME TRANSACTIONS ON MECHATRONICS, VOL. 18, NO. 3, JUNE 2013 821 Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators Yangqiu Xie, Yonghong Tan, and Ruili Dong Abstract—In this paper, a modeling method of XY microposition- of the oscillation and undesired system error caused by hystere- ing stage with piezoelectric actuators is proposed. In the modeling sis in piezoelec