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《The impact of polishing on germanium-on-insulator substrates》.pdf
Vo1．34，No．8 JournaIofSemiconductors Auaust2013
TheimpactofpolishingOilgermanium—on-insulatorsubstrates
LinWang(林旺)，RuanY_ujiao(阮育娇)，ChenSongyan(陈松岩)十，LiCheng(~ )，
LaiHongkai(赖虹凯)，andHuangWei(黄巍)
DepartmentofPhysics，SemiconductorPhotonicsResearchCenter,XiamenUniversity,Xiamen361005，China
Abstract：Wepreparedgermanium—on．insulatorfGOI1substratesbyusingSmart．CutM andwaferbondingtech．
nology．ThefabricatedG0Iisappropriateforpolishingduetoastrongbondingstrengthf2
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