Regeneration of used magnetic seeds with ultrasound employed on the treatment of wastewater from semiconductor industry》.pdf
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Regeneration of used magnetic seeds with ultrasound employed on the treatment of wastewater from semiconductor industry》.pdf
Separation and Purification Technology 108 (2013) 89–95
Contents lists available at SciVerse ScienceDirect
Separation and Purification Technology
journal homepage: /locate/seppur
Regeneration of used magnetic seeds with ultrasound employed on the treatment
of wastewater from semiconductor industry
Shu-Min Shen a, Terng-Jou Wan b,⇑, Ya-Lin Shu b
a Department of Earth and Environmental Sciences, National Chung Cheng University, Chiayi 62102, Taiwan, ROC
b Department of Safety, Health and Environmental Engineering, YunTech Douliou, Yunlin 64002, Taiwan, ROC
a r t i c l e i n f o a b s t r a c t
Article history: In the past, several technologies for the removal of silica particles from chemical mechanical polishing
Received 23 August 2012 (CMP) or backside grinder (BG) wastewater such as chemical coagulation, electrocoagulation, flotation,
Received in revised form 28 January 2013 membrane filtration, and adsorption. Currently, the successful aggregation technologies by employing
Accepted 5 February 2013
magnetic seeds have been reported. This paper assesses the potential for regeneration of used magnetic
Available online 13 February 2013
seeds by ultrasound employed on the treatment of wastewater from the semiconductor industry. The
results show that the reuse cycles of magnetic seeds could be increased up to five times for seeds regen-
Keywords:
erated by ultrasound power of 235 W for 1 min which exhibit
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