SAW-based capacitive sensor with hemispherical electrode for nano-precision gap measurement》.pdfVIP

Sensors and Actuators A 163 (2010) 54–60 Contents lists available at ScienceDirect Sensors and Actuators A: Physical j o u rn al h omepage: w w w. elsev /locate/sna SAW-based capacitive sensor with hemispherical electrode for nano-precision gap measurement J.G. Kim a , T.-J. Lee b , N.-C. Park a , Y.-P. Park a , K.-S. Park a , S.-C. Lim c , W.-S. Ohm a,∗ a Schoo