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STM carbon nanotube tips fabrication for critical dimension measurements》.pdf
Sensors and Actuators A 123–124 (2005) 655–659
STM carbon nanotube tips fabrication for critical
dimension measurements
A. Pasquini ∗, G.B. Picotto, M. Pisani
Istituto di Metrologia “G. Colonnetti”-CNR, Strada delle Cacce 73, 10135 Turin, Italy
Received 16 September 2004; received in revised form 20 January 2005; accepted 19 February 2005
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