原创力文档Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance》.pdfVIP
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Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance》.pdf
Applied Surface Science 353 (2015) 459–468
Contents lists available at ScienceDirect
Applied Surface Science
j o u r n a l h o m e p a g e: w w w. elsev /locate/aps usc
Study of hafnium oxide thin films deposited by RF magnetron
sputtering under glancing angle deposition at varying target to
substrate distance
S. Maidul Haque a , K. Divakar Rao a,∗ , J.S. Misa
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