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Study of ion beam induced mixing during sputter depth profiling of thin films by LEIS》.pdf
102 Nuclear Instruments and Methods in Physics Research B34 (1988) 102-112
North-Holland, Amsterdam
STUDY OF ION BEAM INDUCED MIXING DURING SPUTTER DEPTH PROFILING
OF THIN FILMS BY LEIS
S.G. PURANIK and B.V. KING
Physics Department, Universify of Ne~cas, S~orf~~nd-~308,NS W, Australia
Received 4 January 1988 and in revisedfor
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