气介型压电超声感器的研制.pdfVIP

摘 要 压电超声波传感器的工作以压电转换元件的压电效应为基础，是实现声能与电能 相互转换的器件。压电超声波传感器具有正逆压电效应，具有体积小、重量轻、结构 简单、工作可靠、固有频率高、灵敏度和信噪比高等优点，在电声、水声、医学及军 事等领域获得较多应用。尤其是边缘固定的压电陶瓷－金属双迭片类弯曲振动传感器 (Bimorph flexural piezoelectric ceramic transducer)，被广泛应用于生产和工程技术测量 等实践中。 本文在论述气介型压电超声传感器的基本工作原理的基础上，研究并提出了符合 传感器使用性能要求的设计方案；设计方案内容包括对压电陶瓷材料、粘合剂材料及 其它材料的设计和对传感器内外部结构的设计；我们按照设计方案制作了开放型和密 封型传感器样品，对所制作的传感器样品进行了电容、声压（灵敏度）、中心频率等 相关参数的性能测试。样品性能的测试结果表明样品的性能基本上符合设计要求。本 文详述了传感器相关工艺的原理、流程、优缺点、及工艺条件对传感器性能的影响， 特别讨论了粘合工艺对传感器性能的影响。我们从传感器粘合的基本方法和原理出 发，综合传感器实际制作中的问题，对粘合剂的选择、粘合夹具结构的设计、粘合相 关静载荷的形状设计和粘合层的厚度等方面进行了不断地改进和优化，最终得到比较 理想的粘合工艺条件。 关键词：传感器；声压；灵敏度；工艺 I Abstract Piezoelectric sensor ’s performance is based on the piezoelectric effect. The sensor is device which carries out the mutual change of acoustic energy and electric energy. The sensor has the advanced merit such as small volume, light weight, compact structure, high natural frequency, high sensitiveness and high signal-to-noise ratio . The sensor has been used widely in many fields such as electro-acoustic, hydro-acoustics, iatrology, military, Especially, metal-piezo ceramics bimorph flexural piezoelectric ceramic sensor clamped along boundary is widely used in the field of manufacture and measure. The paper describes the basic work theory, makes the design scheme according to the demand of the use for the sensor. The materials used during the process, include the PZT materials, the adhesive and other materials. The structure of the sensor is also contrived. And then the sample of the sensor is manufactured in the basis of the work done above. The samples are tested for all the performance and they are accord with the design value. The unqualified samples are analyzed to find the reason