毕业设计：纳米金刚石半导体薄膜传感器的研究与模拟.docVIP

北方民族大学 学士学位论文 论文题目: 纳米金刚石半导体薄膜传感器的研究与模拟 摘 要 金刚石具有很强的抗辐射、耐腐蚀性能，是能在高温下使用的新型宽能带隙半导体材料，被誉为发展前景十分广阔的第三代半导体材料。因此，金刚石薄膜可制成耐热、耐冲击、耐腐蚀、抗辐射、灵敏度高的压力传感器件。 本论文根据市场对场致发射材料的需求，在纳米金刚石粉体中掺入纳米石墨粉体制成纳米金刚石浆料，纳米金刚石作为微尖，引入石墨作为导电晶界。用纳米金刚石作为发射体，纳米石墨作为导电媒质，印刷制备场发射薄膜。为印刷制备大面积的，具有稳定均匀的场发射性能的纳米金刚石薄膜，研究纳米金刚石材料超声分散和机械分散方法及浆料的配制新工艺，实验得出浆料中纳米石墨、纳米金刚石、乙基纤维素最佳配比，使纳米金刚石微尖密度合理、分布均匀。为了既能使薄膜表的制浆剂能充分挥发暴露出纳米金刚石微尖，又能使纳米金刚石薄膜牢固地粘结在衬底上，研究了纳米金刚石薄膜的烧结工艺，其最高温度为多少效果最好，建立纳米金刚石薄膜场致发射模型，测试分析了纳米金刚石薄膜的场致发射特性。利用纳米金刚石薄膜的场致发射特性设计了一个压力传感器，并用MATLAB模拟分析纳米金刚石薄膜压力传感器的工作原理。 关键词：纳米金刚石，薄膜，场致发射，压力传感器 ABSTRACT The diamond has strong resist radiation, corrosion resistance, is used in high temperature of the new band gap width of semiconductor material, known as the development prospects of the third generation of semiconductor materials. Therefore, the diamond film can be made into heat, impact resistance, corrosion resistance, radiation, high sensitivity of pressure sensor. This paper according to market demand field-emission materials in nano diamond powders, adding nano graphite powder size, nanotubes made nanodiamond diamond, as the sharp as conductive graphite grain. Using nanometer diamond as projectile, nano conductive medium, printing graphite as preparation of field emission film. The preparation for printing, stable area of field emission performance of uniform diamond thin films, nanometer material nanometer-size diamond ultrasonic dispersing and mechanical method and the paste made dispersed new craft, experiment of nano graphite, nano size diamond and ethyl cellulose, make the best proportion of diamond micro nano tip, reasonable distribution density. To make film of pulping agent can watch volatile exposed nano diamond fine, nano tip diamond film binder firmly in the substrate, the study of diamond film, the highest temperature sintering process, how to best nanometer diamond film field-emission model testing and analysis, the diamond film field-emission characteristics. Using nanometer diamond film field-emis