Vacuum pump.docVIP

The first part: the vacuum pumps need matters needing attention: In 1, a vacuum pump working pressure should satisfy the vacuum equipment vacuum and pressure requirements.Such as: vacuum coating requirements of 1 × 10-5mmHg vacuum degree, the vacuum pump vacuum degree and at least 5 × 10-6mmHg.Often choose to pump vacuum degree of vacuum equipment vacuum degree higher than one half to one order of magnitude. 2, to correctly select the vacuum pump working point.Each pump has certain working pressure range, such as: diffusion pump for 10-3~10-7mmHg, in such a wide pressure range, the pumping spe