明道大学采购报价单.docVIP

明道大學採購報價單 採購單號： 098N04456及098N04459 品 名： In-line Hot-Wire CVD system採購 項次 項目 規 格 預算金額 廠牌/型號 單位 數量 單 價 金 額 1 In-line Hot-Wire CVD system(連續式熱燈絲化學氣相沉積) 一、General description The equipment is a horizontal inline Hot Wire CVD system for coating of planar substrates. It is designed to deposit amorphous Silicon/ Germanium thin film on glass substrate for solar cell applications. 1-1 Characteristic (特性) (1) Reliable isolation gate valve design and good quality. (2) Each chamber is equipped with optical sensor. (3) Robust glass substrate transportation. (4)Integrated with substrate heating,