原创力文档Tuning Effect of N2 on Atmospheric-Pressure Cold Plasma CVD of TiO2 Photocatalytic Films.pdfVIP
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Tuning Effect of N2 on Atmospheric-Pressure Cold Plasma CVD of TiO2 Photocatalytic Films.pdf
PlasmaScienceandTechnology，Vo1．15，No．1，Jan．2013
TuningEffectofN2on Atm ospheric··PressureColdPlasma CVD of
TiP2PhotocatalyticFilm s
DILanbo(底兰波)，LIXiaosong(李小松)，ZHAOTianliang(赵天亮)，
CHANGDalei(常大磊)，LIUQianqian(刘倩倩)，ZHUAimin(朱爱民)
LaboratoryofPlasmaPhysicalChemistry，SchoolofPhysicsand0ptoelectronicEngineering
Dalian UniversityofTechnology，Dalian116024{China
A bstractTodepositTiO2filmsthroughplasmaCVD，thepartialpressureratioofO2toTiC14
shouldbegreaterthanthestoichiometr
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