Complete Mueller matrix measurement with a single high frequency modulation教材.pdfVIP

Thin Solid Films 313 314 1998 4752 Complete Mueller matrix measurement with a single high frequency modulation Eric Compain , Bernard Drevillon, Jean Huc, Jean Yves Parey, Jean Eric Bouree ( ) Laboratoire de Physique des Interfaces et des Couches Minces UPR 258 du CNRS , Ecole Polytechnique, 91128 Palaiseau, France Abstract A new Mueller matrix ellipsometer MME is presented. It provides the simultaneous measurement of the 16 Mueller matrix coefficients in four modulation periods 80 s under the present conditions . This system is accurate error 1% , robust since there are no moving parts, enables low-light-level measurements without a chopper and lock-in amplifier and can be easily used for real time measurements. The setup is based on the polarization modulator samplepolarization detector configuration. The polarization modulation is provided by a coupled-phase-modulator CPM which uses two identical phase-locked electro-optic phase modulators operating at 50 KHz. With the introduction of a coupling object between the two phase modulators, the four Stokes parameters of the light beam, including the intensity, are independently modulated on the basis of the first and second complex harmonics of the modulation signal. The polarization of light, after interaction with the sample, is measured with a multichannel division of amplitude polarimeter DOAP . This DOAP is based on a slightly beveled amorphous-silicon a-Si coated glass plate. The high index of refraction contrast between a-Si and SiO2 p