Dynamic characteristics of ultra-precision aerostatic bearings.pdfVIP

Adv．Manuf．(2013)1：82—86 DOI10．1O07／s40436—013—0013-6 Dynamiccharacteristicsofultra·precisionaerostaticbearings Xue-DongChen ·Jin-ChengZhu ‘HanChen Received：3October2012／Accepted：12November2012／Publishedonline：13M arch2013 @ ShanghaiUniversityandSpringer—VerlagBerlinHeidelberg2013 Abstract W ith high acceleration and ultra—precision dynamicimpactloads．Thedynamicinstabilityoftheair requirements，thedesign ofaerostaticbearingshasbeen bearing，e．g．，self-excited vibration (“pneumaticham graduallyfocusedonhteirdynamicperformances．Inhtis mer”)，wasconsideredinearlystudies 1