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Gate leakage current of NMOSFET with ultra-thin gate oxide.pdf
J．Cent．SouthUniv．(2012)19：3105—3109 垒Springer
D0I：l0．1007／sll771—012—1385—7
GateleakagecurrentofNMOSFETwithultra—thingateoxide
HUShi—gang(胡仕刚)，wUXiao—Feng(吴笑峰)，XIZai—fang(席在芳)
SchoolofInformationandElectricalEngineering，
HunanUniversityofScienceandTechnology，Xiangtan411201，China
◎CentralSouthUniversiytPressandSpringer-VerlagBerlinHeidelberg2012
Abstraet：Asdimensionsofthemetal—oxide．sem
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