原创力文档Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature.pdfVIP
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Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature.pdf
RAREMETALS
Vo1．30,No．2，apr2011，P．170
DOh 10．1007／s12598-011—0219·3
Influenceofoxygen gascontenton thestructuraland opticalpropertiesof
ZnO thinfilmsdepositedbyRFmagnetronsputteringatroom temperature
LIUBaoting，ZHOUYang，ZHENGHongfang，LIMana~GUOZhe，ZHAOQingxun，and
PENGYingcai。
CollegeofPhysicsScienceandTechnology,HebeiUniversity,Baoding071002，China
BaodingUniversiyt,Baoding071000,China
。CollegeofElectronicandInformationEngineering,HebeiUniversiyt,Baoding071002，China
Received15July2010；receivedinrevisedform 8October2010；accepted10October2010
@TheNonferrousMeta1sSocietyofChinaandSpri
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