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Influence of process parameters on band gap of AI-doped ZnO film.pdf
Front．Optoelectron．2013，6(1)：11 l21
D0I10．1007／s12200—012—0302．x
Influenceofprocessparametersonbandgap
0fAI-dopedZnOf¨m
DiqiuHUANG，XiangbinZENG(囡)，YajuanZHENG，XiaojinWANG，YanyanYANG
SchoolofOpticalandElectronicInformation，HuazhongUniversity ofScienceandTechnology,W uhan430074，China
◎ HigherEducationPressandSpringer-VerlagBerlinHeidelberg2013
Abstract ThisPaperpresentstheinfluenceofprocess toomuchlightaccompaniedwithalow hardnessandpoor
parameters，suchasargon(Ar)flowrate，sputteringpower stability,sotheyhavebe
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