Measurement of optical mirror with a small-aperture interferometer.pdfVIP

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Measurement of optical mirror with a small-aperture interferometer.pdf

Measurement of optical mirror with a small-aperture interferometer.pdf

Front.Optoelectron.2012,5(2):218-223 D0I10.1007/s12200.012—0233—6 Measurementofo liCCaaIlmirrorwiitthllas~mmaall-aappeerrttuurree interferometer YaGAO ,HonYuenTAM ,YongfuWEN ,HuijingZHANG ,HaoboCHENG(函) 1SchoolofOptoelectronics,BeijingInstituteofTechnology,Beijing100081,China 2DepartmentofM anufacutringEngineeringandEngineeringM anagement,CityUniversityofHongKong,HongKong,China ◎ HigherEducationPressandSpringer—VerlagBerlinHeidelberg2012 Abstraet In thisPaDer.the principle of subape

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