晶体生长仿真软件FEMAG-横向磁场直拉硅晶体生长全局模拟.ppt

晶体生长仿真软件FEMAG-横向磁场直拉硅晶体生长全局模拟.ppt

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* * * * * * * * * * FEMAGSoft ? 2013 Oxygen concentration (m-3): top left: parallel cross section in melt; bottom left: perpendicular cross section in melt; top right: crystal Case 3 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 5000 G Gas flow: no Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Case 1 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 3000 G Gas flow: no Oxygen concentration (m-3): top left: par

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