CUSP磁场对8英寸半导体级硅晶体生长的影响(simulation with FEMAG晶体生长模拟软件).pptVIP

FEMAGSoft ? 2012 PERSPECTIVES What FEMAGSoft can do: All the required simulation work is possible. However this work has to be performed very carefully in order to guarantee that exact quantitative results are obtained All the required model improvements are available. However the associated material data have to be cross-checked and validated and this requires a very high expertise As a general conclusion, the CUSP effect is very encouraging for the oxygen distribution in the crystal. Further simulations will be more specific and quantitative if associated to a calibration process base