基于微电子机械系统的光学电流传感器原理与设计.pdfVIP

27 卷 3 期 中 国 电 机 工 程 学 报 Vol.27 No.3 Jan. 2007 2007 年1 月 Proceedings of the CSEE 2007 Chin.Soc.for Elec.Eng. 文章编号：0258-8013 (2007) 03-0089-06 中图分类号：TM452.94 文献标识码：A 学科分类号：47040 基于微电子机械系统的光学电流传感器原理与设计 赵本刚，徐 静，高 翔，刘玉菲，吴亚明 ( 中科院上海微系统与信息技术研究所传感技术国家重点实验室，上海市 长宁区 200050) Theory and Design of Optical Current Sensor Based on MEMS ZHAO Ben-gang, XU Jing,GAO Xiang, LIU Yu-fei,WU Ya-ming (State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning District, Shanghai 200050, China) ABSTRACT: Optical current sensors have conquered the 件的性能进行了仿真模拟和分析。理论结果表明：温度补偿 disadvantage of conventional optical current transducer, but 后，温度变化50K 时测试误差为 0.2% ，400A、2000A 电 they are faced with some shortcomings, such as difficulty of 流下的灵敏度分别为 0.001dB/A 与 0.09dB/A, 说明了基于 production and unstable performance influenced by MEMS 技术的光学电流传感器具有一定的研究价值。 environmental temperature. Many good performance devices 关键词：光学电流传感器；微电子机械系统；扭转微镜；温 can be in batches fabricated by novel MEMS technology. A 度补偿；耦合损耗 MEMS-OCS (Micro-Electronic Mechanic System-Optical Current Sensor) detecting high alternating current was 0 引言 introduced. Its sensing head of primary side is composed of 随着电力工业的迅速发展与电力传输容量的 Rogowski coils, torsional micro-mirror and dual fiber 不断增加，运行电压等级也随之增高。作为一种监 collimator. Theory about sensing and opt