active micromechanical motion amplifiers using the mechanical resonance modulated by variable stiffness springs经典可变刚度弹簧的机械谐振式有源微机械运动放大器.pdfVIP

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active micromechanical motion amplifiers using the mechanical resonance modulated by variable stiffness springs经典可变刚度弹簧的机械谐振式有源微机械运动放大器.pdf

active micromechanical motion amplifiers using the mechanical resonance modulated by variable stiffness springs经典可变刚度弹簧的机械谐振式有源微机械运动放大器

Sensors and Actuators A 180 (2012) 97–104 Contents lists available at SciVerse ScienceDirect Sensors and Actuators A: Physical j o u r n a l h o m e p ag e: w w w. elsev /locate/sna Active micromechanical motion amplifiers using the mechanical resonance modulated by variable stiffness springs Yun Jung Heo 1, Won Chul Lee 1, Taeyoon Kim 2 , Young-Ho Cho ∗ Department of Bi

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