一种使用性很强相位解包方法.pdfVIP

干涉条纹图像处理的相位解包新方法 万文博 苏俊宏 杨利红 徐均琪 西安工业大学 光电工程学院, 710032 摘要 干涉图的处理是光干涉计量中的关键技术。现代干涉测量技术具有高精度、非接触性和大视场等的测量优点。 采用泰曼-格林型干涉系统，建立被测物与干涉相位之间的数学模型，通过MATLAB软件，实现对被测参数的自动化测 量。本文基于二维快速傅里叶方法的基本原理提出了一种新的相位解包算法——菱形种子算法。该算法通过识别一个 种子点，然后依次向相邻四点扩展，再把这四个点作为第二批种子点，依次向各自的四点邻域扩展，以菱形轨迹遍历 所有的有效信息点，以到达整个图象的相位解包。本文采用该算法测量薄膜样片的厚度，该算法测试的结果与 ZYGO 测试结果比较，PV误差为0.0364λ，RMS最大误差为0.002λ，说明运用该算法虽然处理的是单幅干涉图但可以得到 高精度的相位分布。 关键词 干涉图；二维快速傅里叶法；相位解包；薄膜测试 A novel algorism of phase unwrapping for image processing of interferogram WAN Wen-bo SU Jun-hong YANG Li-hong XU Jun-qi School of Optoelectronics Engineering, Xi’an Technological University, Xi’an, Shaanxi 710032 ，China Abstract Interferogram processing is one of main techniques in optical interferometry metrology. Modern interferometry for thin-film thickness has the advantages of noncontact, high accuracy and rich-field, etc. Taking advantage of Twyman-Green interferometer, the relationship between interferogram and measured material object parameter can be determined by mathematical model, thus the thickness of measured material object is measured automatically. A new algorism of phase unwrapping for measuring the material object is proposed based on the FFT method——algorism of diamond phase unwrapping, this algorism identifies a seed point, seed points spread to four points nearby the fist seed point, the four points will serve as the second group of seed points, seed points spread to four points nearby the second group of seed points in turn, pass through all of the effective information points by a diamond path. Seed points will eventually bring about the phase unwrapping in the entire image. In this paper, the thin-film thickness is determined