从白光干涉曲线获取光学薄膜反射相位与物理厚度的新算法_罗震岳.pdfVIP

30 　6 　　　 V ol.30, No.6 20 10 6 ACTA OPTICA SINICA June, 20 10 　　:0253-2239 (2010)06-1835-06 从白光干涉曲线获取光学薄膜反射相位和 物理厚度的新算法 ＊ 罗震岳　薛　晖　张淑娜　沈伟东 　顾培夫　章岳光 (, 310027) 　, 。 , , , 。 。 TiO , 。 2 。 　;;;; 　O436.1　　　　A 　　　doi:10.3788/AOS20 103006.1835 Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from W hite-L ight Interferometry Luo Zhenyue　Xue Hui　Zhang Shuna　Shen Weidong　Gu Peifu　Zhang Yueguang (State KeyLaboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, Zhejiang 3 10027, hina) Abstract　White-light spe tral interferometer for measuring physi al thi kness and refle tion phase of thin film is designed.A novel algorithm is also presented to ompensate the phase retrieval error in traditional signal pro essing method.Exa t refle tion phase is retrieved via a multiple variable optimization algorithm, and the result of linear fit is used as the initial guess.Numeri al simulation is performed to demonstrate theoreti al availability and high pre ision of the algorithm.A group of single layer TiO thin films are measured and pro essed with this method, and 2 the retrieved physi al thi kness results fit the results by photometry very well.The system and algorithm presented provide a new way for fast measurement of thin film thi kness. Key words　opti al thin film;white light interferometry;refle tion phase;spe trum analysis;optimization theory [4] 1　　　 , 、 [5]