超精密加工技术综述精要.doc

. 【摘要】 超精密加工技术发展方向是：向高精度、高效率方向发展；向大型化、微型化方向发展；向加工检测一体化方向发展；机床向多功能模块化方向发展。本世纪的精密加工发展到超精密加工历程比较复杂且难度大，目前超精密加工日趋成熟，已形成系列，它包括超精密切削、超精密磨削、超精密研磨、超精密特种加工等。尽管超精密加工迄今尚无确切的定义，但是它仍然在向更高的层次发展。超精密加工将向高精度、高效率、大型化、微型化、智能化、工艺整合化、在线加工检测一体化、绿色化等方向发展。在不久的将来，精密加工也必将实现精密化、智能化、自动化、高效信息化、柔性化、集成化。创新思想及先进制造模式的提出也必将为精密与超精密技术发展提供策略。环保也是机械制造业发展的必然趋势。 【关键词】超精密加工 发展趋势 发展策略 后续研发 Abstract Ultra-precision machining technology development direction is: towards high-precision, high-efficiency direction; to large-scale, micro-oriented development; to detect the direction of integration process; machines to multi-modular direction. Precision machining of the century to the development of ultra-precision machining process is more complex and difficult, the current ultra-precision machining matures, has formed a series, which includes the ultra-precision machining, ultra precision grinding, ultra-precision grinding, ultra-precision special processing. Despite the ultra-precision machining so far no precise definition, but it is still in development to a higher level. Will be ultra-precision machining precision, high efficiency, large-scale, miniaturization, intelligence, process integration technology, online processing and testing integration, green and other direction. In the near future, and will also achieve precision machining precision, intelligence, automation, information technology and efficient, flexible, integrated. Innovative ideas and advanced manufacturing mode are also bound to raise precision and ultra-precision technology development strategy. Environmental protection machinery manufacturing industry is the inevitable trend of development  目 录 1 引言 ……………………………………………………………………………1 2 超精密加工的发展前景…………………………………………………………2 2.1高精度、高效率……………………………………………………………2 2.2大型化、微型化……………………………………………………………2 2.3智能化………………………………………………………………………2 2.4工艺整合化…………………………………………………………………2 2.3在线加工检测一体化………………………………………………………2 2.6绿色化………………………………………………………………………2 3精密加工技术在未来在