光刻技术历史与发展.docVIP

编号 河南大学2010届本科毕业论文 光刻技术历史与发展 姓 名： 作者学号：1003618023 所在学院：所学专业：电子信息科学与技术 导师姓名： 导师职称：讲师 摘要 光刻工艺是集成电路最重要的加工工艺，他起到的作用 如题金工车间中车床的作用，光刻机如同金属加工工车间的车床。在整个芯片制造工艺中，几乎每个工艺的实施，都离不开光刻的技束。光刻也是制造IC的最关键技术，他占芯片制造成本的35%以上。在如今的科技与社会发展中，光刻已经每年以百分之三十五的速度增长，他的增长，直接关系到大型计算机的运作等高科技领域，现在大型计算机的每个芯片上可以大约有10亿个零件。这就需要很高的光刻技术。如今各个大国都在积极的发展光科技束。光刻技术与我们的生活息息相关，我们用的手机，电脑等各种各样的电子产品，里面的芯片制作离不开光科技束。 在我们的日常生活中，也需要用到光刻技术制造的各种各样的芯片，最普通的就是我们手里的手机和电脑。如今是一个信息社会，在这个社会中各种各样的信息流在世界流动。而光刻技术是保证制造承载信息的载体。在社会上拥有不可替代的作用。 本论文的作用是向大家普及光刻的发展历史和光刻的发展方向，以及光刻的种类，每种光刻种类的优点和缺点。并且向大家讲述光刻的发展前景。在光刻这一方面，我国的专利意识稀薄，很多技术都没有专利，希望我辈能改变这个状况 关键字:光刻技术 ；光刻种类；光刻中外历史。 Lithography process is the most important processing technology of integrated circuit, he play a role Such as the role of the lathe in machining shop, lithography as metalworking shop lathe. In the whole chip manufacturing technology, implementation of almost every process is inseparable from the lithography technology of beam. Lithography is the key technology of manufacturing IC, he war more than 35% of the chip manufacturing cost. In todays science and technology and social development, lithography has been growing at thirty-five percent a year, his growth, is directly related to the operation of large computer and other high-tech areas, large computer per chip can now has about 1 billion parts. This will require a very high lithography. Now the big countries are actively the development of light beam technology.Lithography is closely related to our life, we use the phone, all kinds of electronic products such as computer, the inside of the chip production without light beam of science and technology. In our daily life, also need to use photolithography technology manufacturing all kinds of chips, the most common is our cell phones and computers. Today is a information society, in the society all kinds of traffic flow in the world. And make the bearing lithography technology is to make sure the carrier of information. Has an irreplaceable role in soci