量子阱红外探测器双面金属光栅设计优化.pdfVIP

43 卷 5 期 红外与激光工程 2014 年5 月 Vol.43 No.5 Infrared and Laser Engineering May 2014 量子阱红外探测器双面金属光栅设计优化 周 州，耿红艳，刘杰涛，许斌宗，胡海峰，宋国峰，徐 云 ( 中国科学院半导体研究所 纳米光电子实验室，北京 100083) 摘 要 提出了一种增强量子阱红外探测器耦合效率的双面金属光栅结构。采用三维时域有限差分 算法(3D-FDTD)对GaAs/AlGaAs 量子阱红外探测器双面结构金属光栅进行了仿真分析。通过对比不 同周期、占空比、金属 厚度结构参数下探测器的电场分布及相对耦合效率，确定了4.8 滋m 探测器优 化的双面金属光栅结构。与顶部和底部单 金属光栅结构比较，双面金属光栅结构探测器相对耦合效 率提高到 3 倍以上。探测器相对耦合效率随光栅周期变化的双峰曲线特性体现了双面金属光栅结构 在双色量子阱红外探测器光耦合方面的潜力。同时该结构还可以应用于单色、双色及多色量子阱焦平 面红外探测器。 ； 关键词 双面结构 金属光栅； 量子阱红外探测器； 表面等离子极化激元 中图分类号 TN215 文献标志码 A 文章编号 1007-2276(2014)05-1375-05 Design and optimization of dual side metal grating for quantum well infrared photodetector Zhou Zhou, Geng Hongyan, Liu Jietao, Xu Binzong, Hu Haifeng, Song Guofeng, Xu Yun (Nano鄄Optoelectronics Laboratory , Institute of Semiconductors , Chinese Academy of Sciences , Beij ing 100083, China) Abstract: A new structure of dual side metal grating used to improve coupling efficiency was demonstrated. By using the three dimensional finite difference time domain algorithm, the proposed dual side metal grating for GaAs/AlGaAs Quantum Well Infrared Photodetector was studied. The optimization parameters at wavelength 4.8 滋m were confirmed by the electric field distribution and relative coupling efficiency at different periods, duty circles and metal thicknesses. The relative coupling efficiency of the proposed dual side metal grating was over three times of the counterparts of single side metal grating at front or back. The bimodal curve of the relative coupling efficiency for the dual side met