微重力环境中的气体质量流量控制器研究.pdfVIP

0254-6124/2012/32(6)-841–05 Chin. J. Space Sci. Li Ming, Yu Qiang, Zhai Guangjie, Sun Zhibin. Research of a mass flow controller for microgravity environment. Chin. J. Space Sci., 2012, 32(6): 841-844 Æ 1,2 1 1 1 1(Æ 100190) 2( 100049) . . , MEMS . MEMS (), A/D , () , PID , , , . . , , .