Michaelquirk半导体制造技术附录图教程.ppt

Definitions of Safety Terms Hazardous: Any chemical or substance that has adverse effects on the health or safety of people. Toxic: Any chemical or substance that seriously damages biological tissue. Examples are phosphine and arsine. Flammable: Any liquid or gas that is capable of igniting into fire. Pyrophoric: Any material that ignites spontaneously in air below 55?C (130?F). An example is silane. Examples of Hazards in Semiconductor Manufacturing Process chemicals Highly flammable gases Pyrophoric gases Corrosive gases Toxic or caustic liquids High voltages Solvents Mechanical hazards High temperatures Radiation UV Laser X-ray Freezing temperatures Hazard Warning Sign Definitions of Exposure Limits(Refer to p. 602 for details) TLV-TWA: Threshold limit values – time weighted average. TLV-STEL: Threshold limit values – short term exposure limit. IDLH: Immediately dangerous to life and health. PEL: Permissible exposure limit. How Chemicals Enter the Body 1. Contact with skin or eyes. Wear safety glasses and no contact lens. Use goggles to protect normal eyewear. Wear the appropriate glove type for the job. Chemicals absorbed through the pores of the skin can enter the body and cause damage to vital organs. Use full face shield when pouring or mixing chemicals. How Chemicals Enter the Body 2. Ingestion (swallowing). Certain toxic chemicals can be fatal when even a minute amount in ingested. Never bring food or drink into areas where chemicals are being used. It is good practice to wash hands with soap and water when leaving the workplace. How Chemicals Enter the Body 3. Inhalation. Breathing toxic gases may result in burns or damage to lung tissue and can pass into the bloodstream, damaging other organs. The workplace must be well-ventilated. If unusual odors are detected, notify someone in charge and leave the area. Sound an alarm if appropriate. Common Information in MSDS Chemical name Date prepared PEL TLV Health effects Physical/Chemical characteristics