Cell_Process_introduction讲课.ppt

Cell process introductionCell INTJune 19.2008 Contents Cell process FEOL BEOL BPC introduction PI Coating Rubbing process introduction Prebake and postbake PI Pre bake Hotplate Function： 预固化 PI Inspection PI Inspection Function Automatic and Manual Check the abnormal of PI Coating Method CCD Line Sensor Camera and Microscope Inspection Item Mura Particles Other defect Rubbing process introduction Rubbing Density Strength Rubbing Density R= N*(2πrVrot±Vmove)/Vmove Rubbing Strength S=R*P P: NIP between Rubbing Cloth and Stage Basic Theory of Rubbing Basic Theory of Rubbing Rubbing Line Main Component Rubbing Inspection Method Vapor Inspection Inspection Item Rubbing Uniformity Rubbing Mura ODF process introduction ODF process introduction ODF process introduction ODF process introduction ODF process introduction ODF process introduction ODF process introduction ODF process introduction ODF process introduction Cell Cut introduction LOT1 and LOT2 Cutter wheel Penett 　Lateral Crack Median Crack Cell Cut introduction LD Beveling After Beveling Cleaner LOT1 Auto clave LOT2 Polarizer Line B/F port Panel Cleaner B/F port Polarizer Attach ULD BEOL –Polarizer attach Process flow Process Cell Beveling Process flow Multi wheel 定盤 L/D 倒角 磨長邊 磨短邊 倒角 UL/D Panel Polarizer attach process introduction Polarizer attach Process flow Inlet spinning section Panel clean alignment POL setting POL cleaning POL alignment Attach section Inverting ULD alignment ULD section CST Soft X-ray Ion Gun CCD camera VCR TFT CF Attach roller 偏光片貼附方法：背貼式 撕離形紙 Stage上升 Stage上轉30度 Polarizer attach process introduction IVO Confidential IVO Confidential InfoVision Optoelectronics Structure of LCD Driving IC LC Polarizer TFT Main Seal CF Spacer Polarizer Cell (Array included) CCFL Reflector Light Guide / Diffuser MDL FEOL –PI Coating Process flow LD Sorter Pre-cut Process Before PI Cleaning PS Height measure PI Coating/Pre bake PI Post bake Rubbing Process Before PI Cleaning PI Coating/Pre