等离子体刻蚀技术在可控聚合物纳米线制备中的应用技巧.ppt

Applications of ICP Etching In Fabrication of Controllable Polymer Nanowires;Zhong Lin Wang;Nanowires : Sizes, interfacial properties and electronic properties can be precisely controlled during synthesis Possible to combine different chemical composition in nanoscale Structures of NWs can be designed to achieve new functions;Polymer nanowires (PNWs) Potential applications in organic light-emitting diodes (OLEDs), field-effect transistors (FETs) and solar cells Orientation, dimensionality and location control required (Challenge!!) ;Previous approach: Anodic aluminum oxide (AAO) template-based technique Distorted and bunched PNWs after removing the template Our approach: Inductively coupled plasma (ICP) etching Plasma Highly ionized gas High chemical reactivity ;Methods to generate plasma;Plasma etching Key process in large-scale integrated circuit manufacture Physical and chemical etching process;Improvement (ICP) Inductive coils are used to create an intense plasma(1015 cm-3)with higher energy Connect the sample to the RF signal to get a more anisotropic etching ;;Earlier edition;All NWs perpendicular to the substrate Uniform size and distribution Not limited by the chemical structures, worked for any organic materials interested;Pattern fabrication All NWs along the lines scratched by the needle tip No NWs where were unscratched (flat) ;Proposed mechanism;Improved edition;a. PMMA b. PS c. PDMS d. PEDOT/PSS e. PEN f. PET g. Durafilm h. Kapton film i. 4 ×4cm2 Kapton NWs;Pattern control;Density control (why?);Length control;Let’s test it in a real device!!;Summary;References;Appendix;MEH-PPV poly(2-methoxy, 5-(2’- ethylhexyloxy)-1,4-phenylene vinylene an optoelectronic polymer for OLEDs and organic solar cells;Thank you for your attention