真空罗茨泵设计说明书.doc

摘要 卷绕式真空镀膜机真空泵结构设计  PAGE \* MERGEFORMAT III 摘 要 真空泵，机械，物理，化学，物理和化学方法如萃取容器中，以获得和维持真空设备。真空泵和其他设备（如真空容器，真空阀，真空计，连接管路等）组成的真空系统，广泛应用于电子，冶金，化工，食品，机械，制药，航空航天等行业。按泵的工作原理，本质上捕获气体进入气体泵和泵的类型。泵包括：液环真空泵，往复式真空泵，旋片式真空泵，真空泵定子，活塞泵，摆线泵，干式真空泵，真空泵，分子泵，牵引泵，复合泵，水喷射泵气体喷射泵，蒸汽喷射泵，扩散泵。捕获的气体泵，包括：一个吸附泵和低温泵。 针对设计要求，对罗茨真空泵进行了设计。主要包括传动系统的设计。罗茨真空泵工作原理与罗茨鼓风机相似。由于转子的连续旋转，气体从进气口吸入到转子与壳体之间的空间中，然后通过排气口排出。因为空间是封闭的抽吸状态下，所以不存在气体在泵室的压缩和膨胀。然而，当转动时，转子的排气口的上边缘，该空间与排气侧连通，排气侧的气体压力越高，洗涤气体的一部分返回到该空间中，气体的压力急剧增加。随着转子继续旋转时，气体排出泵。 关键词：真空镀膜机；真空泵；结构设计卷绕式真空镀膜机真空泵结构设计  PAGE \* MERGEFORMAT II Abstract Vacuum pumps with mechanical，physical，chemical，physical and chemical methods such as container extraction in order to obtain and maintain a vacuum device . Vacuum pumps and other equipment (such as vacuum container，vacuum valves，vacuum gauges， connecting pipes，etc.) consisting of a vacuum system，widely used in electronics，metallurgy， chemical，food，machinery，pharmaceuticals，aerospace and other sectors. Press the pump works，essentially trapping gases into the gas pump and pump types . Pump include : liquid ring vacuum pumps，reciprocating pumps，rotary vane vacuum pumps，vacuum pump stators，piston pumps，trochoid pump，dry vacuum pumps，vacuum pumps，molecular pumps，traction pumps，composite pumps， water jet pump gas jet pumps，steam jet pumps，diffusion pumps. Trapped gas pump comprising: a sorption pump and a cryopump . For the design requirements，the Roots vacuum pump design . Including the transmission system designs. Roots vacuum pump works with the Roots blower similar. Due to the continuous rotation of the rotor，gas is drawn from the intake port into the space between the rotor and the casing，and then discharged through the exhaust port. Because the space is closed suction state，so there is no gas in the pump chamber compression and expansion . However，when the top edge of the exhaust port of the rotor rotated，the space communicates with the exhaust side，the higher the exhaust -side gas pressure，a portion of the washe