TFT-LCD前段制成介绍.pptVIP

Array Process 一 GL PEP Cleaning Sputter Coating Exposure Developing Dry etching Strip Open/Short Text 二 I/S PEP Cleaning AP-CVD Cleaning P-CVD Clenaing O2 ashing Coating Back exosre Exposure Developing Wet etching Strip 三 AI PEP cleaning P-CVD Coating Exposure Developing CDE dry etching Strip 四 PX PEP Cleaning ITO sputter ITO cleaning Coating Exposure Developing Wet etching Strip 五 TH PEP Coating Exposure Developing Wet etching Sttip 六 SL PEP Clenaing S/D Sputter S/D Cleaning Coating Exposure Developing S/D Etching N+Cut Strip 七 PV PEP Cleaning P-CVD Coating Exposure Developing