非晶硅薄膜进展解决方案.docVIP

非晶硅薄膜及其研究进展 摘要： 关键词：薄膜 Research Progress on a-Si:H Thin Films and Related Preparation Method Abstract: Hydrogenated amorphous silicon (a-Si:H) thin film has attracted considerable attention and been a subject of extensive studies worldwide on account of its important applications such as thin film solar cells, thin film transistors, radiation detectors, and liquid crystal displays based on its good electrical and optical properties. In this paper, the progress research on a-Si:H thin films and related preparation method are reviewed. Key words: a-Si:H thin films; doped; preparation method; re