毕业论文静电放电(ESD)器件的模拟与研究.docVIP

编号 论文 题目：学院专业 学 号 学生姓名 指导教师 二〇一四年月 摘 要 ABSTRACT ESD is one of the most important reliability problems of IC products which lies in every flow of IC production，and it is also one of the most difficult problems of developing new generation technology，therefore ，the research on ESD protection design has attracted more and more attention. The applications of simulation tools on ESD area make the design of ESD protection devices more convenient,and greatly shorten the development cycle. This paper particularly explain show ESD comes from，what harm will bring， how to test the integrated circuits ability to prevent from the static，also concentrates on the simulation of ESD protection devices ,based on the Sentaurus TCAD platform.And the main content of this paper include: First,this paper points out the importance of mesh definition in process simulation. Second,physical models and functions used in device simulation are analyzed. Third,the physical mechanisms related are investigated when ESD happens ,and the relevant physical models which should be chosen in device simulation are listed. Forth,convergence problems caused by different reasons are discussed,and the solutions are presented. Keyword: ESD；Sentaurus TCAD；ESD models；Grid；Device simulation；BJT；SCR 目 录 1章 绪论 1 1.1 课题的研究背景及意义 1 1.2 国内外概况 1 1.3 本课题的研究内容 2 1.4 课题的研究方法和步骤 2 第2章 总体方案设计及设计软硬件环境概述 3 2.1 总体设计方案 3 2.2单片机概述 3 2.3 AT89S52单片机简介 4 2.3.1 AT89S52单片机概况 4 2.3.2 AT89S52引脚功能 4 2.4 软件编程环境 6 2.4.1 keil软件开发系统介绍 6 2.4.2 Keil C51开发系统的主要功能 6 2.4.3 Keil运行界面及操作步骤 7 第3章 GSM模块TC35概述 11 3.1 GSM网络介绍 11 3.2 TC35模块 11 3.2.1 TC35模块概述 11 3.2.2 TC35主要技术指标及引脚功能 12 3.2.3 TC35数据接口 12 3.2.4 TC35系统结构 13 3.3 AT指令及PDU工作模式 13 3.3.1 AT指令简介 13 3.3.2 短消息工作模式 14 3.3.3 PDU包协议格式 14 3.3.4 短消息的编码方法 15 第4章 系统软件设计 17 4.1 程序编写思路 17 4.2