EDA OASIS格式介绍.pptVIP

Abstract A new Open Artwork System Interchange Standard (OASIS) has been recently proposed for replacing the GDSII format. A primary objective of the new OASIS format is to enhance the compressibility of layout data. We compare the data compression capability of the Full OASIS set of operators with those also present in GDSII, which we refer to as the Restricted OASIS format. We measure the compression quality of the OASIS and GDSII operators in two contexts: (1) Compressible fill generation, where the fill amounts are specified and compressible fill is then generated, and (2) Post-fill data compression, when fill has already been generated and is then compressed. Our experimental results confirm the advantages of the OASIS compression operators: compressed file sizes using the Full OASIS format are on average about twice as small as those obtained using the Restricted OASIS format. We propose new OASIS-based compression algorithms which outperform industry physical verification tools. We also evaluate the respective merits of the individual repetition operators in OASIS and suggest possible improvements to the OASIS repetition operators. Motivation Dummy Fill is added to VLSI layouts to reduce manufacturing variation, but it explodes layout data volume and creates a bottle neck in the design-to-manufacturing handoff. We require dummy fill compression. Filled layout with dummy fill grouped in 9 repetitions Post-CMP ILD thickness Features Dummy features Post-CMP ILD thickness Dummy fill equalizes spatial layout density and improves CMP uniformity Full OASIS Repetition Types Geometry Compression Operators TYPE 4 TYPE 5 TYPE 6 TYPE 7 TYPE 8 The OASIS Format An OASIS file is a sequence of bytes divided into records. A fill feature (rectangle, polygon, trapezoid, circle, etc.) is represented by the corresponding OASIS record format. OASIS defines eight repetition types. A repetition represents an “array” of records, and thus enables compressio