ESC基础培训20100811-1探索.docVIP

Electrostatic Chuck Basic 2 Coulombic Chuck 2 Johnsen-Rahbek Chuck 4 Bipolar E-chuck chucking scheme 6 Bipolar E-chuck chucking scheme 7 Bipolar E-chuck dechucking scheme 9 Bipolar E-chuck Schematics 10 Bipolar E-chuck Operation Scheme 10 Monopolar E-chuck 12 Monopolar E-chuck Schematics 13 Low Temp Ceramic Puck 14 Low Temp Ceramic Puck: Embossment 15 Low Temp Ceramic Puck 16 Low Temp E-chuck Puck: Electrodes 16 Low Temp E-chuck 17 Interface Box 19 Voltage on Terminals 19 Cr Assembly 20 Filter Assembly 21 RF Cable Assembly 21 RF Cable Assembly 22 Bipolar E-chuck Power Supply 23 TC an