DCVDProcessintrodution课程.pptVIP

unique id: 086465 Documentum\SMIC-IP(Aug2001)(Scn).ppt Content CVD Instruction Basic Definition CVD Reaction Principle DCVD Application in IC Process DCVD Film Property and Reaction mechanism DCVD Process and Hardware Development in the Future CVD Instruction CVD Instruction CVD Reaction Principle CVD Reaction Principle DCVD Application Inter Metal Dielectric(IMD) Final Passivation Dielectric ARC(Antireflective coating) The demand for smaller CD has necessitated the move to lower exposure wavelengths in microlithography. But this gives rise to one problem --- control of reflection from th