《应用物理学专业毕业论文：光敏凝胶薄膜的制备及其上光栅结构的引入》.docVIP

┊┊┊┊┊┊┊┊┊┊┊┊┊装┊┊┊┊┊订┊┊┊┊┊线┊┊┊┊┊┊┊┊┊┊┊┊┊毕业设计（论文）报告纸共 NUMPAGES 32 页 第 PAGE 31 页光敏凝胶薄膜的制备及其上光栅结构的引入应用物理学 [摘要] 氧化铪具有非常优良的物理和化学性能，它折射率高（~2.0），在紫外至红外波段范围吸收系数小，因而在光学薄膜领域应用广泛。本文以叔丁氧基铪为前驱体，乙酰丙酮与苯甲酰丙酮为螯合剂，制备了具有负性光刻胶性质的HfO2光敏溶胶。用旋涂法和提拉法镀制了凝胶薄膜，其在紫外波段（300~400nm）具有特征吸收峰。采用掩膜和紫外曝光工艺，显影后在上薄膜上引入了周期为50um和2um的光栅结构。[关键词] 溶胶-凝胶，镀膜，紫外曝光，显影，光栅[Abstract] Hafnium oxide has excellent physical and chemical properties. It is high optical index (~2.0) and low absorption materials used in particular for optical coatings operating between the near UV and IR regions. In this article, hafnium oxide was prepared by a sol-gel process. The material was synthesized using hafnium tetra-butoxide which was dissolved in ethanol and mixed with acetylacetone and benzoylacetone. Using spin-coating and dip-coating technique we prepared some gel films, the gel film showed characteristic absorption bands in a UV-region (300~400nm) and negative tone of photoresist. The negative tone films were irradiated with high pressure mercury lamp through masks of 50um and 2um period, and then developed in ethyl alcohol. After these steps, we obtained fine patterning structures of grating on the photosensitive film. [Keyword] sol-gel, coating, UV-exposure, develop, diffractive grating目录 TOC \o 1-2 \h \z \u HYPERLINK \l _Toc169241186 1 绪论 PAGEREF _Toc169241186 \h 3 HYPERLINK \l _Toc169241187 1.1 Sol-Gel技术 PAGEREF _Toc169241187 \h 3 HYPERLINK \l _Toc169241188 1.2 微加工工艺 PAGEREF _Toc169241188 \h 6 HYPERLINK \l _Toc169241189 1.3 本文工作及研究意义 PAGEREF _Toc169241189 \h 8 HYPERLINK \l _Toc169241190 2 HfO2光敏凝胶薄膜的制备及其上光栅结构的引入 PAGEREF _Toc169241190 \h 10 HYPERLINK \l _Toc169241191 2.1 HfO2光敏凝胶薄膜的制备 PAGEREF _Toc169241191 \h 10 HYPERLINK \l _Toc169241192 2.3 图形转移 PAGEREF _Toc169241192 \h 13 HYPERLINK \l _Toc169241193 2.4小结 PAGEREF _Toc169241193 \h 14 HYPERLINK \l _Toc169241194 3物性表征及工艺总结 PAGEREF _Toc169241194 \h 15 HYPERLINK \l _Toc169241195 3.1 光谱分析 PAGEREF _Toc169241195 \h 15 HYPERLINK \l _Toc169241196 3.2 曝光特性 PAGE