全球半导体晶体生长建模著名商业软件FEMAG--Dynamic_Simulation_of_the_Entire_Crystal_Growth_Process..docxVIP

全球半导体晶体生长建模著名商业软件FEMAGDynamic Simulation of the Entire Crystal Growth Process: Multi-Scale Analysis of Melt Flow TransientsV. Regnier, L. Wu, B. Delsaute,F. Bioul, N. Van den Bogaert, F. DupretCESAME, Université catholique de Louvain, E-mail: fd@mema.ucl.ac.beAbstractThis paper investigates the transient melt flow evolution during a complete Czochralski crystal growth process. Two basic time scales are considered. The short scale concerns the basic transients associated with flow oscillations at different process stages. Accurate understanding of the flow mechanisms at this scale is required t