椭偏仪原理..docVIP

摘要 椭偏术是一种利用线偏振光经样品反射后转变为椭圆偏振光这一性质以获得样品的光学常数的光谱测量方法。本文主要介绍了椭偏仪的光学原理。比较了不同类型椭偏仪的异同点，对椭偏仪的工作特点和应用进行了说明，并展望了今后的发展趋势。对于学习和了解椭偏仪具有较好的指导效果。 关键词：光学原理、椭偏仪、推导 Abstract Ellipsometry is the spectral measurement that reflects the linearly polarized light by the sample in order to obtain its optical constant. This paper is to mainly introduce the optics principle of the ellipse leaning meter. Pointing out the similarities and differences among different types of ellipse leaning meter, it explains the feature and the application of the ellipse leaning meter, and has forecast its future trend of development.