ppt课件-系统级建模及模拟光学 m e m 系统（ system- level modelingand simulationof optical m e m systems）.pptVIP

HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION Timeline of MEMS and MEME So what are MEMS? Microelectromechanical systems (MEMS) small integrated devices or systems that combine electrical and mechanical components range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices. Timeline of MEMS Timeline of MEMS