《Graphene石墨烯制备设备.pptVIP

Graphene 石墨烯制备设备 联系人：李先生 010202 邮箱：liyuqiang@longsun.asia Graphene 石墨烯制备设备 联系人：李先生 010202 邮箱：liyuqiang@longsun.asia Grephene 石墨烯 制备设备 姓名：李余强 Mail: liyuqiang@longsun.asia 欢迎技术交流： 010202 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Copyright 2004-2011 Aspose Pty Ltd. AS-One 石墨烯制备设备 可实现石墨烯制备和RTP 快速退火功能 Up to 1500°C, up to 200°C/s, high vacuum capability, fast cooling option 设备外观图： a． 带电脑桌 b. 不带电脑桌 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Copyright 2004-2011 Aspose Pty Ltd. 设备的基本结构： Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Copyright 2004-2011 Aspose Pty Ltd. 石墨烯生长腔室结构 Thermocouple Thermocouple Vacuum Cold wall chamber Halogen lamps Pyrometer position at edge viewport Wafer Quartz window GAS INLET Pyrometer at central viewport 腔室结构示意图 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Copyright 2004-2011 Aspose Pty Ltd. 石墨烯生长腔室结构 腔室内部实物图 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Copyright 2004-2011 Aspose Pty Ltd. 为什么选用该种结构： 冷腔壁结构，优点： 1.Low memory effect and high process reproducibility 低记忆效应和高可重复性 2.Higher cooling rates (enhanced cooling rates with fast cooling option) 高的降温速率 3.Ultra clean and contamination-free environment 高洁净低污染 4.Easy to clean and maintain 便于清理维护 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Copyright 2004-2011 Aspose Pty Ltd. 最佳的腔体设计 最佳的腔体设计 1.Laminar gas flow optimized by modelization 气流的在腔室中是层流式的，实现气流的均匀化到达基底表面，可实现石墨烯的均匀生长。 2.The gas injection beneath the quartz window avoids cold spots on the substrate 气流是是从石英玻璃表面到达基地表面，可以实现气流无冷流出现（低温气流） 3. Minimum volume, reduced surface for better high vacuum performance and easy cleaning of the chamber 腔体容积小，可实现高真空，容易清理。 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile . Co