ppt课件-processsequencepressure-actuatedvalve.pptVIP

Process Sequence: Pressure-Actuated Valve ENMA490 October 14, 2003 Outline Wafer 1 Fabrication Silicon Substrate SU-8 Bottom Fluid Layer PDMS Gas Layer PDMS Thin Flex Layer Wafer 1 Layer Integration Wafer 2 Fabrication Pyrex Substrate SU-8 Cover Layer SU-8 Top Fluid Layer Integration of Wafer 1 and Wafer 2 PDMS Layer Removal and Attachment Wafer 1: Process SequenceSilicon SubstrateSU-8 Bottom Fluid Layer Wafer 1: Process SequencePDMS Gas Layer Wafer 1: Process SequencePDMS Thin Flex Layer Wafer 1: Layer Integration Wafer 2: Process SequencePyrex SubstrateSU-8 Cover Layer Wafer 2