基于微控制器的风速风向传感器系统设计J.docVIP

基于微控制器的风速风向传感器系统设计张燕波沈广平董自强秦明黄庆安 （东南大学MEMS教育部重点实验室南京210096） 提出了一种基于的热风速风向传感器系统设计方案。传感器采用陶瓷衬底加工，直接安装技术热温差工作原理测量风速和风向。微控制器集成的电流型DA对传感器恒温差控制360o风向检测3°，风速的检测范围达到35 m/s。 关键词：MEMS；温度补偿风传感器智能传感器系统 TN36　　文献标识码：A　　国家标准学科分类代码：510.3030 Design of wind sensor system based on microcontroller Zhang Yangbo, Shen Guangping, Dong Ziqiang, Qin Ming, Huang Qing’an (Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nangjing 210096, China) Abstract：This paper proposed an thermal wind sensor system based on Wheatstone full bridge. The sensor structure was optimized by ANSYS software in thermal field and electrical field. The chip was fabricated on the ceramic substrate by lift off process, and packaged by the direct chip packaging technology. The constant temperature difference mode is used to control the wind sensor system, which the integrated current-type D/A is introduced to set the initial state of this mode and compensate the system fluctuation cased by the drift of ambient temperature, therefore the system working temperature extend from -40 ℃ to 60 ℃. Calorimetric mode adopt eight temperature sensing elements to form two Wheatstone full bridges, so as to improve the testing range and signal sensitivity simultaneity. As the microcontroller integrates a large number of analog and digital components, the number of the off-chip components can be reduced, as well as the size of the system. Wind tunnel test results show that the wind sensor system can detect wind speed up to 35 m/s and wind direction of 360o, the wind direction error is 3o. Key words：MEMS; temperature compensation; wind sensor system; smart sensor system 1　引　　言 风速风向是气象资料中非常重要的部分，在气象预报、环境监测与控制等方面有重要的应用。传统的测量方法主要用风杯来测量风速，用风向标测量风向[1]。这些机械装置体积大、价格昂贵，且具有移动部件，维护不便。近20年来，微电子机械系统（MEMS）的发展为风速传感器的发展带来了新的突破口[2]。基于微机械加工技术的热式风速传感器可以同时完成风速风向的测量，且具有精度高、体积小、功耗低、不易损坏等优点。 随着微电子和微加工技术的不断进步，MEMS传感器根据摩尔定律按比例不断缩小。然而，由于热风速传感器结构的特殊性，将MEMS传感器与接口电路单片集成并不会显著降低整个测量系统的成本，而且需要较高的研发周期。 为了实现风速风向测量系统的微型化和智能化，本文提出了一种基于S